Conductive Feature Formation and Structure

ABSTRACT

Generally, the present disclosure provides example embodiments relating to conductive features, such as metal contacts, vias, lines, etc., and methods for forming those conductive features. In an embodiment, a barrier layer is formed along a sidewall. A portion of the barrier layer along the sidewall is etched back. After etching back the portion of the barrier layer, an upper portion of the barrier layer along the sidewall is smoothed. A conductive material is formed along the barrier layer and over the smoothed upper portion of the barrier layer.

PRIORITY CLAIM AND CROSS-REFERENCE

This application is a divisional of U.S. patent application Ser. No.15/880,448, filed on Jan. 25, 2018, entitled “Conductive FeatureFormation and Structure,” which claims the benefit of and priority toU.S. Provisional Patent Application No. 62/592,476, filed on Nov. 30,2017, entitled “Conductive Feature Formation and Structure,” which isincorporated herein by reference in its entirety.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experiencedexponential growth. Technological advances in IC materials and designhave produced generations of ICs where each generation has smaller andmore complex circuits than the previous generation. In the course of ICevolution, functional density (e.g., the number of interconnecteddevices per chip area) has generally increased while geometry size(e.g., the smallest component (or line) that can be created using afabrication process) has decreased. This scaling down process generallyprovides benefits by increasing production efficiency and loweringassociated costs. However, scaling down has also led to challenges thatmay not have been presented by previous generations at largergeometries.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1 through 19 are cross-sectional views of respective intermediatestructures during an example method for forming conductive features inaccordance with some embodiments.

FIG. 20 is a profile of layers in an opening through a dielectric layerat an intermediate stage of an example method for forming a conductivefeature in accordance with some embodiments.

FIG. 21 is a profile of layers in an opening through a dielectric layerat an intermediate stage of an example method for forming a conductivefeature in accordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Generally, the present disclosure provides example embodiments relatingto conductive features, such as metal contacts, vias, lines, etc., andmethods for forming those conductive features. In some examples, abarrier layer and/or adhesion layer formed in an opening through adielectric layer is pulled-back (e.g., etched) to have a height in theopening that is below the top surface of the dielectric. Some exampleprocesses for pulling back the barrier layer and/or adhesion layer cancause a constriction at an upper region of the opening, and accordingly,in some examples, a subsequent pull-back (e.g., etch) is performed tosmooth the barrier layer and/or adhesion layer to reduce or remove theconstriction. Among other things, this can permit a conductive materialdeposited on the barrier layer and/or adhesion layer to be deposited inthe opening without having a void formed in the conductive material.

Example embodiments described herein are described in the context offorming conductive features in Front End Of the Line (FEOL), Middle EndOf the Line (MEOL), and/or Back End Of the Line (BEOL) processing fortransistors. Implementations of some aspects of the present disclosuremay be used in other processes and/or in other devices. Some variationsof the example methods and structures are described. A person havingordinary skill in the art will readily understand other modificationsthat may be made that are contemplated within the scope of otherembodiments. Although method embodiments may be described in aparticular order, various other method embodiments may be performed inany logical order and may include fewer or more steps than what isdescribed herein. In some figures, some reference numbers of componentsor features illustrated therein may be omitted to avoid obscuring othercomponents or features; this is for ease of depicting the figures.

FIGS. 1 through 19 illustrate cross-sectional views of respectiveintermediate structures during an example method for forming conductivefeatures in accordance with some embodiments. FIG. 1 illustrates asemiconductor substrate 30 with at least portions of devices formedthereon. The semiconductor substrate 30 may be or include a bulksemiconductor, a semiconductor-on-insulator (SOI) substrate, or thelike, which may be doped (e.g., with a p-type or an n-type dopant) orundoped. Generally, an SOI substrate comprises a layer of asemiconductor material formed on an insulator layer. The insulator layermay be, for example, a buried oxide (BOX) layer, a silicon oxide layer,or the like. The insulator layer is provided on or is a substrate,typically a silicon or glass substrate. Other substrates, such as amulti-layered or gradient substrate may also be used. In someembodiments, the semiconductor material of the semiconductor substratemay include an elemental semiconductor like silicon (Si) and germanium(Ge); a compound semiconductor including silicon carbide, galliumarsenic, gallium phosphide, indium phosphide, indium arsenide, and/orindium antimonide; an alloy semiconductor including SiGe, GaAsP, AlInAs,AlGaAs, GaInAs, GaInP, and/or GaInAsP; or a combination thereof.

As illustrated in the figures and described herein, the devices areField Effect Transistors (FETs), which may be planar FETs or Fin FETs(FinFETs). In other implementations, the devices can include VerticalGate All Around (VGAA) FETs, Horizontal Gate All Around (HGAA) FETs,bipolar junction transistors (BJTs), diodes, capacitors, inductors,resistors, etc. In accordance with planar FETs and/or FinFETs, gatestacks 32 are formed on active areas of the semiconductor substrate 30.In planar FETs, the active areas can be a portion at the top surface ofthe semiconductor substrate 30 delineated by isolation regions. InFinFETs, the active areas can be three-dimensional fins protruding frombetween isolation regions on the semiconductor substrate 30.

The gate stacks 32 can be operational gate stacks like in a gate-firstprocess or can be dummy gate stacks like in a replacement gate process.Each gate stack 32 can comprise a dielectric layer over the active area,a gate layer over the dielectric layer, and, in some instances, a masklayer over the gate layer. The dielectric layer, gate layer, and masklayer for the gate stacks 32 may be formed by sequentially forming ordepositing the respective layers, and then patterning those layers intothe gate stacks 32. For example, in a gate-first process or areplacement gate process, the dielectric layer may include or be siliconoxide, silicon nitride, the like, or multilayers thereof; the gate layermay include or be silicon (e.g., polysilicon) or another material; andthe mask layer may include or be silicon nitride, silicon oxynitride,silicon carbon nitride, the like, or a combination thereof. In agate-first process, for example, the dielectric layer (e.g., gatedielectric) may include or be a high-k dielectric material, such ashaving a k value greater than about 7.0, which may include a metal oxideor silicate of Hf, Al, Zr, La, Mg, Ba, Ti, Pb, multilayers thereof, or acombination thereof, and the gate layer (e.g., gate electrode) mayinclude or be a metal-containing material such as TiN, TaN, TaC, Co, Ru,Al, multi-layers thereof, or a combination thereof. Processes forforming or depositing the dielectric layer, gate layer, and mask layerinclude thermal and/or chemical growth, Chemical Vapor Deposition (CVD),Plasma-Enhanced CVD (PECVD), Molecular-Beam Deposition (MBD), AtomicLayer Deposition (ALD), Physical Vapor Deposition (PVD), and otherdeposition techniques.

The layers for the gate stacks 32 may then be patterned to be the gatestacks 32, for example, using photolithography and one or more etchprocesses. For example, a photo resist can be formed on the mask layer(or gate layer, for example, if no mask layer is implemented), such asby using spin-on coating, and can be patterned by exposing the photoresist to light using an appropriate photomask. Exposed or unexposedportions of the photo resist may then be removed depending on whether apositive or negative resist is used. The pattern of the photo resist maythen be transferred to the layers of the gate stacks 32, such as byusing one or more suitable etch processes. The one or more etchprocesses may include a reactive ion etch (RIE), neutral beam etch(NBE), the like, or a combination thereof. The etching may beanisotropic. Subsequently, the photo resist is removed in an ashing orwet strip processes, for example.

Gate spacers 34 are formed along sidewalls of the gate stacks 32 (e.g.,sidewalls of the dielectric layer, gate layer, and mask layer) and overthe active areas on the semiconductor substrate 30. The gate spacers 34may be formed by conformally depositing one or more layers for the gatespacers 34 and anisotropically etching the one or more layers, forexample. The one or more layers for the gate spacers 34 may include orbe silicon nitride, silicon oxynitride, silicon carbon nitride, thelike, multi-layers thereof, or a combination thereof, and the etchprocess can include a RIE, NBE, or another etching process.

Source/drain regions 36 are formed in the active regions on opposingsides of a gate stack 32. In some examples, the source/drain regions 36are formed by implanting dopants into the active areas using the gatestacks 32 and gate spacers 34 as masks. Hence, source/drain regions 36can be formed by implantation on opposing sides of each gate stack 32.In other examples, the active areas may be recessed using the gatestacks 32 and gate spacers 34 as masks, and epitaxial source/drainregions 36 may be epitaxially grown in the recesses. Epitaxialsource/drain regions 36 may be raised in relation to the active area.The epitaxial source/drain regions 36 may be doped by in situ dopingduring the epitaxial growth and/or by implantation after the epitaxialgrowth. Hence, source/drain regions 36 can be formed by epitaxialgrowth, and possibly with implantation, on opposing sides of each gatestack 32. Example dopants for source/drain regions 36 can include or be,for example, boron for a p-type device and phosphorus or arsenic for ann-type device, although other dopants may be used. The source/drainregions 36 may have a dopant concentration in a range from about 10¹⁹cm⁻³ to about 10²¹ cm⁻³.

FIG. 2 illustrates the formation of a first interlayer dielectric (ILD)38 and a second ILD 40. The first ILD 38 and second ILD 40 may eachinclude an etch stop layer (ESL) and a principal dielectric layer suchas a low-k dielectric layer, for example. Generally, an etch stop layercan provide a mechanism to stop an etching process when forming, e.g.,contacts or vias. An etch stop layer may be formed of a dielectricmaterial having a different etch selectivity from adjacent layers, forexample, the principal dielectric layer of the ILD.

The first ILD 38 is deposited over the active areas, gate stacks 32, andgate spacers 34. For example, the etch stop layer may be conformallydeposited over the active areas, gate stacks 32, and gate spacers 34.The etch stop layer may comprise or be silicon nitride, silicon carbonnitride, silicon carbon oxide, carbon nitride, the like, or acombination thereof, and may be deposited by CVD, PECVD, ALD, or anotherdeposition technique. Then, for example, the principal dielectric layeris deposited over the etch stop layer. The principal dielectric layermay comprise or be silicon dioxide, a low-k dielectric material (e.g., amaterial having a dielectric constant lower than silicon dioxide), suchas silicon oxynitride, phosphosilicate glass (PSG), borosilicate glass(BSG), borophosphosilicate glass (BPSG), undoped silicate glass (USG),fluorinated silicate glass (FSG), organosilicate glasses (OSG),SiO_(x)C_(y), Spin-On-Glass, Spin-On-Polymers, silicon carbon material,a compound thereof, a composite thereof, the like, or a combinationthereof. The principal dielectric layer may be deposited by spin-on,CVD, Flowable CVD (FCVD), PECVD, PVD, or another deposition technique.

The first ILD 38 can be planarized after being deposited. Aplanarization process, such as a Chemical Mechanical Polish (CMP), maybe performed to planarize the first ILD 38. In some processes, such asin a gate-first process, the top surface of the first ILD 38 may beabove top surfaces of the gate stacks 32. In other processes, such as areplacement gate process, the top surface of the first ILD 38 isplanarized to be coplanar with top surfaces of the gate stacks 32 tothereby expose the gate stacks 32 through the first ILD 38. In suchprocess, the planarization may remove the mask layer of the gate stacks32 (and, in some instances, upper portions of the gate spacers 34), andaccordingly, top surfaces of the gate layer of the gate stacks 32 areexposed through the first ILD 38.

In a replacement gate process, the gate stacks 32 exposed through thefirst ILD 38 can be removed and replaced with other gate stacks 32. Onceexposed through the first ILD 38, the gate layer and dielectric layer ofthe gate stacks 32 are removed, such as by one or more etch processes.The gate layer may be removed by an etch process selective to the gatelayer, wherein the dielectric layer can act as an etch stop layer, andsubsequently, the dielectric layer can be removed by a different etchprocess selective to the dielectric layer. The etch processes can be,for example, a RIE, NBE, a wet etch, or another etch process.Replacement gate stacks can be formed as the gate stacks 32 where thegate stacks 32 were removed. The replacement gate stacks 32 can eachinclude one or more conformal layers and a gate electrode over the oneor more conformal layers. The one or more conformal layers include agate dielectric layer and may include one or more work-function tuninglayers.

The gate dielectric layer can be conformally deposited where the gatestacks 32 were removed (e.g., on surfaces of the active areas andsidewalls and top surfaces of the gate spacers 34) and on the topsurface of the first ILD 38. The gate dielectric layer can be or includesilicon oxide, silicon nitride, a high-k dielectric material,multilayers thereof, or other dielectric material. A high-k dielectricmaterial may have a k value greater than about 7.0, and may include ametal oxide of or a metal silicate of Hf, Al, Zr, La, Mg, Ba, Ti, Pb, ora combination thereof. The gate dielectric layer can be deposited byALD, PECVD, MBD, or another deposition technique.

Then, if implemented, a work-function tuning layer may be conformallydeposited on the gate dielectric layer. The work-function tuning layermay include or be tantalum, tantalum nitride, titanium, titaniumnitride, the like, or a combination thereof, and may be deposited byALD, PECVD, MBD, or another deposition technique. Any additionalwork-function tuning layers may be sequentially deposited similar to thefirst work-function tuning layer.

A layer for the gate electrodes is formed over the one or more conformallayers. The layer for the gate electrodes can fill remaining regionswhere the gate stacks 32 were removed. The layer for the gate electrodesmay be or comprise a metal-containing material such as Co, Ru, Al, W,Cu. multi-layers thereof, or a combination thereof. The layer for thegate electrodes can be deposited by ALD, PECVD, MBD, PVD, or anotherdeposition technique.

Portions of the layer for the gate electrodes and the one or moreconformal layers above the top surface of the first ILD 38 are removed.For example, a planarization process, like a CMP, may remove theportions of the layer for the gate electrodes and the one or moreconformal layers above the top surface of the first ILD 38. Thereplacement gate stacks 32 comprising the gate electrodes and one ormore conformal layers may therefore be formed.

The second ILD 40 is deposited over the first ILD 38. For example, theetch stop layer may be conformally deposited over the first ILD 38.Then, for example, the principal dielectric layer is deposited over theetch stop layer. The etch stop layer and principal dielectric layer ofthe second ILD 40 can be or include the same or similar materials andcan be deposited using the same or similar techniques as described abovewith respect to the first ILD 38. The second ILD 40 can be planarized,such as by a CMP, after being deposited.

FIG. 3 illustrates the formation of openings 42, 44, and 46 through thesecond ILD 40 and the first ILD 38. The first opening 42 exposes a gatestack 32 and an adjoining source/drain region 36. The first opening 42is therefore for forming a butted conductive feature between the exposedgate stack 32 and adjoining source/drain region 36. The second opening44 exposes a source/drain region 36, and is therefore for forming aconductive feature to the exposed source/drain region 36. The thirdopening 46 exposes a gate stack 32, and is therefore for forming aconductive feature to the exposed gate stack 32. The openings 42, 44,and 46 may be formed using, for example, appropriate photolithographyand etching processes. As an example, the opening 44 can have a firstdimension D1 (e.g., a width) in a range from about 10 nm to about 50 nm,and can have a second dimension D2 (e.g., a height) in a range fromabout 50 nm to about 200 nm. An aspect ratio of the opening 44 (e.g., aratio of the second dimension D2 to the first dimension D1) can be in arange from about 2 to about 4.

FIG. 4 illustrates the formation of an adhesion layer 50 conformally inthe openings 42, 44, and 46, and a barrier layer 52 on the adhesionlayer 50. The adhesion layer 50 layer is conformally deposited in theopenings 42, 44, and 46, such as on the exposed source/drain regions 36,exposed gate stacks 32, sidewalls of the first ILD 38 and second ILD 40,and the top surface of the second ILD 40. The barrier layer 52 isconformally deposited on the adhesion layer 50. The adhesion layer 50may be or comprise, for example, titanium, cobalt, nickel, the like or acombination thereof, and may be deposited by ALD, CVD, or anotherdeposition technique. The barrier layer 52 may be or comprise titaniumnitride, titanium oxide, tantalum nitride, tantalum oxide, the like, ora combination thereof, and may be deposited by ALD, CVD, or anotherdeposition technique. Silicide regions may be formed on upper portionsof the source/drain regions 36 by reacting upper portions of thesource/drain regions 36 with the adhesion layer 50 and/or barrier layer52. An anneal can be performed to facilitate the reaction of thesource/drain regions 36 with the adhesion layer 50 and/or barrier layer52. In a particular example, the adhesion layer 50 is a layer oftitanium, and the barrier layer 52 is a layer of titanium nitride. Theadhesion layer 50 and barrier layer 52 may have various thicknesses asdescribed below following further processing.

FIG. 5 illustrates the formation of a Bottom Anti-Reflection Coating(BARC) 54 in the openings 42, 44, and 46 over the barrier layer 52. TheBARC 54 may be, for example, an organic material or another materialdeposited by spin-coating or another deposition technique. The BARC 54may be initially deposited in the openings 42, 44, and 46 and to a levelabove the top surface of the second ILD 40 and/or above top surfaces ofthe barrier layer 52. The BARC 54 may subsequently be etched back tohave top surfaces below the top surface of the second ILD 40. The BARC54 may be etched back to a third dimension D3 below the top surface ofthe second ILD 40, which third dimension D3 can be in a range from about15 nm to about 40 nm. Further, a fourth dimension D4 is from a bottomsurface of the opening 44 (e.g., a surface of the active area to whichthe opening 44 is formed) to the top surface of the BARC 54. A ratio ofthe fourth dimension D4 to the second dimension D2 is less than 1, suchas less that about 0.7, and more particularly, in a range from about 0.3to about 0.7.

The etch back may be or include a dry (e.g., plasma) etch process. Theplasma etch process may include a RIE, NBE, ICP etch, the like, or acombination thereof. Example etchant gases that can be used for a plasmaetch process include argon (Ar) gas or another etchant gas. A flow rateof the etchant gas(es) of a plasma etch process may be in a range fromabout 2000 sccm to about 5000 sccm. A plasma etch process may implementa DC substrate bias in a range from about 100 kV to about 300 kV. Apower of a plasma etch process may be in a range from about 500 W toabout 1500 W. A pressure of a plasma etch process may be in a range fromabout 3 mtorr to about 5 mtorr. The depth of the etch back (e.g., thethird dimension D3) can be controlled by a duration of the etch processused for the etch back. A duration of a plasma etch process can be in arange from about 15 seconds to about 120 seconds.

FIG. 6 illustrates the pulling back (e.g., removal by etching) ofportions of the barrier layer 52 and the adhesion layer 50 above the topsurfaces of the BARC 54 and at upper regions of the openings 42, 44, and46. By removing the portions of the barrier layer 52 and the adhesionlayer 50 above the top surfaces of the BARC 54 and at upper regions ofthe openings 42, 44, and 46, first, second, and third conductive featureadhesion layers 50 a, 50 b, and 50 c and first, second, and thirdconductive feature barrier layers 52 a, 52 b, and 52 c are formed in thefirst, second, and third openings 42, 44, and 46, respectively.

The portions of the barrier layer 52 and adhesion layer 50 may beremoved using an etch process. The etch process can include a two-stepwet etch process. A pre-treatment with a first wet etchant is performed.An example first wet etchant includes diluted hydrofluoric (dHF) acid.In some examples, the dHF may be diluted to about one part hydrofluoric(HF) acid to one hundred or more parts deionized water (DIW) (1:>=100,HF:DIW), such as in a range from about one part HF acid to one hundredparts DIW (1:100) to about one part HF acid to five hundred parts DIW(1:500). A second step etching with a second wet etchant is subsequentlyperformed. Example second wet etchants include hydrofluoric (HF) acid,hydrogen peroxide (H₂O₂), ammonium hydroxide (NH₄OH), hydrochloric acid(HCl), a Standard Clean-1 (SC1), a Standard Clean-2 (SC2), the like, ora combination thereof, which may further be diluted in deionized water(DIW). For example, the second wet etchant can be a mixture of NH₄OH orHCl with H₂O₂ and DIW at a ratio of 1:X:Y ((NH₄OH or HCl):H₂O₂:DIW),where X is in a range from about 1 to about 10, and Y is in a range fromabout 5 to about 120. A process time for the two-step wet etch processcan be in a range from about 30 seconds to about 600 seconds, and aprocess temperature for the two-step wet etch process can be in a rangefrom about 23° C. (e.g., room temperature) to about 67° C. The two-stepwet etch process can be performed in situ in some examples. Other etchprocesses with different process parameters may be used.

The BARC 54 acts as a mask during the removal of the portions of thebarrier layer 52 and the adhesion layer 50. Hence, top surfaces of,e.g., the second conductive feature adhesion layer 50 b and secondconductive feature barrier layer 52 b can be at the third dimension D3from the top surface of the second ILD 40 and/or at the fourth dimensionD4 from the bottom surface of the opening 44. Further, the top surfacesof the second conductive feature adhesion layer 50 b and secondconductive feature barrier layer 52 b can be at a position that has theratio of the fourth dimension D4 to the second dimension D2.

FIG. 7 illustrates the removal of the BARC 54. The BARC 54 may beremoved by an ashing process, such as may use a plasma comprising oxygen(O₂), hydrogen (H₂), nitrogen (N₂), or another gas. After removal of theBARC 54, a residue and/or byproduct may be on upper surfaces of theconductive feature barrier layers 52 a, 52 b, and 52 c interior to therespective openings 42, 44, and 46. The residue and/or byproduct are atprofiles 60, an example of which is illustrated and described furtherwith respect to FIG. 20 subsequently. The byproduct and/or residue mayresult from the removing (e.g., etching) of the portions of the barrierlayer 52 and adhesion layer 50 in FIG. 6 and/or from the removing theBARC 54 in FIG. 7. The byproduct and/or residue can decrease a dimensionof and/or constrict the respective openings 42, 44, and 46 at the upperportions of the conductive feature barrier layers 52 a, 52 b, and 52 c.The first, second, and third conductive feature adhesion layers 50 a, 50b, and 50 c and first, second, and third conductive feature barrierlayers 52 a, 52 b, and 52 c may have various dimensions as describedbelow with respect to FIG. 20.

FIG. 8 illustrates subsequent pulling back (e.g., etching) of theconductive feature barrier layers 52 a, 52 b, and 52 c and conductivefeature adhesion layers 50 a, 50 b, and 50 c to create modifiedconductive feature barrier layers 52 a′, 52 b′, and 52 c′ and modifiedconductive feature adhesion layers 50 a′, 50 b′, and 50 c′,respectively. The etching removes byproduct and/or residue from thesurfaces of the upper portions of the conductive feature barrier layers52 a, 52 b, and 52 c, and can smooth (e.g., by tapering) the upperportions of the conductive feature barrier layers 52 a, 52 b, and 52 cand conductive feature adhesion layers 50 a, 50 b, and 50 c. Thesmoothing of the modified conductive feature barrier layers 52 a′, 52b′, and 52 c′ and modified conductive feature adhesion layers 50 a′, 50b′, and 50 c′ are at profiles 62, an example of which is illustrated anddescribed further with respect to FIG. 21 subsequently. The etching canfurther tune heights of the modified conductive feature barrier layers52 a′, 52 b′, and 52 c′ and modified conductive feature adhesion layers50 a′, 50 b′, and 50 c′ (e.g., reducing the respective heights), such asby increasing a duration of the etching. The first, second, and thirdmodified conductive feature adhesion layers 50 a′, 50 b′, and 50 c′ andfirst, second, and third modified conductive feature barrier layers 52a′, 52 b′, and 52 c′ may have various dimensions as described below withrespect to FIG. 21.The etching may be by a wet etch process, forexample.

In some examples, the etching includes a two-step wet etch process. Apre-treatment with a first wet etchant is performed. An example firstwet etchant includes diluted hydrofluoric (dHF) acid. In some examples,the dHF may be diluted to about one part hydrofluoric (HF) acid to onehundred or more parts deionized water (DIW) (1:>=100, HF:DIW), such asin a range from about one part HF acid to one hundred parts DIW (1:100)to about one part HF acid to five hundred parts DIW (1:500). A secondstep etching with a second wet etchant is subsequently performed.Example second wet etchants include hydrofluoric (HF) acid, hydrogenperoxide (H₂O₂), hydrochloric (HCl) acid, the like, or a combinationthereof. In some examples, the second wet etchant may be diluted toabout one part etchant to thirty or less parts DIW (1:<=30), such as ina range from about one part etchant to five parts DIW (1:5) to about onepart etchant to thirty parts DIW (1:30). A process time for the two-stepwet etch process can be in a range from about 30 seconds to about 300seconds, and a process temperature for the two-step wet etch process canbe in a range from about 23° C. (e.g., room temperature) to about 67° C.

The pre-treatment can etch a byproduct and/or residue on the conductivefeature barrier layers 52 a, 52 b, and 52 c at a rate in a range fromabout 2 nm per minute to about 5 nm per minute, and can etch theconductive feature barrier layers 52 a, 52 b, and 52 c at a rate in arange from about 0.3 nm per minute to about 0.6 nm per minute. Aselectivity of the etching of the pre-treatment (e.g., a ratio of theetch rate of the byproduct and/or residue to the etch rate of theconductive feature barrier layers 52 a, 52 b, and 52 c) can be in arange from about 2 to about 12. The second step can etch a byproductand/or residue on the conductive feature barrier layers 52 a, 52 b, and52 c at a rate in a range from about 0.5 nm per minute to about 1 nm perminute, and can etch the conductive feature barrier layers 52 a, 52 b,and 52 c at a rate in a range from about 0.3 nm per minute to about 1.5nm per minute. A selectivity of the etching of the second step (e.g., aratio of the etch rate of the byproduct and/or residue to the etch rateof the conductive feature barrier layers 52 a, 52 b, and 52 c) can be ina range from about 0.3 to about 3.

The two-step wet etch process can be performed in situ in some examples.The example two-step wet etch process can be performed without inducingdamage to the gate stacks 32, for example. Other etch processes withdifferent process parameters may be used.

FIG. 9 illustrates the formation of conductive material 66 in theopenings 42, 44, and 46 and on the modified conductive feature barrierlayers 52 a′, 52 b′, and 52 c′. The conductive material 66 may be orcomprise a metal, such as tungsten, copper, aluminum, gold, silver,alloys thereof, the like, or a combination thereof, and may be depositedby CVD, ALD, PVD, or another deposition technique. The smoothing toform, e.g., the modified conductive feature barrier layers 52 a′, 52 b′,and 52 c′ can permit larger dimensions at upper portions of the openings42, 44, and 46 compared to when the byproduct and/or residue is present(and, therefore, forming a constriction), and the larger dimensions canpermit the conductive material 66 to better fill the openings 42, 44,and 46 without a void in the conductive material 66 in the openings 42,44, and 46.

FIG. 10 illustrates the removal of excess conductive material 66. Afterthe conductive material 66 is deposited, excess conductive material 66over the top surface of the second ILD 40 may be removed by using aplanarization process, such as a CMP, for example. The planarizationprocess may remove excess conductive material 66 from above the topsurface of the second ILD 40. This forms conductive features 70, 72, and74 comprising the conductive material 66 in the openings 42, 44, and 46,respectively. Top surfaces of the conductive features 70, 72, and 74 andsecond ILD 40 may be coplanar. Accordingly, conductive features 70, 72,and 74 including the conductive material 66, barrier layers 52 a′, 52b′, and 52 c′, and adhesion layers 50 a′, 50 b′, and 50 c′ (and,possibly, silicide regions) may be formed to corresponding gate stacks32 and/or source/drain regions 36. As apparent from FIG. 10, the widthsof the conductive material 66 of the conductive features 70, 72, and 74at the top surfaces thereof are increased by pulling back the barrierlayer 52 and the adhesion layer 50, which increases a surface area towhich respective subsequent conductive features can make contact.

As shown by the preceding, aspects of some embodiments can be applied toFront End Of the Line (FEOL) and Middle End Of the Line (MEOL)processes. Conductive features 70, 72, and 74, including the processesby which the conductive features 70, 72, and 74 were formed, canimplement aspects of various embodiments in FEOL and/or MEOL. Otherconductive features formed in FEOL and/or MEOL processes may similarlyincorporate aspects according to some embodiments. For example,replacement gate stacks can be formed according to some embodiments. Forreplacement gate stacks, for example, conformal layers, such as adielectric layer and/or work-function tuning layer(s), that are formedwhere a dummy gate stack was removed can be deposited and pulled backaccording to the same or similar processes illustrated and describedabove with respect to FIGS. 4 through 8 for the adhesion layer 50 andthe barrier layer 52, and the gate electrode may be deposited and formedlike the conductive material 66 in FIGS. 9 through 10.

FIG. 11 illustrates the formation of an intermetallization dielectric(IMD) 80. The IMD 80 may include an etch stop layer (ESL) and aprincipal dielectric layer such as a low-k dielectric layer, forexample. The IMD 80 is deposited over the second ILD 40 and conductivefeatures 70, 72, and 74. For example, the etch stop layer may bedeposited over the second ILD 40 and conductive features 70, 72, and 74.Then, for example, the principal dielectric layer is deposited over theetch stop layer. The etch stop layer and principal dielectric layer ofthe IMD 80 can be or include the same materials and can be depositedusing the same techniques as described above with respect to the firstILD 38. The IMD 80 can be planarized after being deposited, such as by aCMP.

FIG. 12 illustrates the formation of openings 82, 84, and 86 through theIMD 80. The openings 82, 84, and 86 expose the conductive features 70,72, and 74, respectively, and are for forming conductive features to theconductive features 70, 72, and 74, respectively. The openings 82, 84,and 86 may be formed using, for example, appropriate photolithographyand etching processes. As an example, the opening 84 can have a fifthdimension D5 (e.g., a width) in a range from about 10 nm to about 40 nm,and can have a sixth dimension D6 (e.g., a height) in a range from about30 nm to about 50 nm. An aspect ratio of the opening 84 (e.g., a ratioof the sixth dimension D6 to the fifth dimension D5) can be in a rangefrom about 1 to about 5.

FIG. 13 illustrates the formation of an adhesion layer 90 conformally inthe openings 82, 84, and 86, and a barrier layer 92 on the adhesionlayer 90. The adhesion layer 90 layer is conformally deposited in theopenings 82, 84, and 86, such as on the exposed conductive features 70,72, and 74 and sidewalls of the IMD 80, and on the top surface of theIMD 80. The barrier layer 92 is conformally deposited on the adhesionlayer 90. The adhesion layer 90 may be or comprise, for example,titanium, cobalt, nickel, the like or a combination thereof, and may bedeposited by ALD, CVD, or another deposition technique. The barrierlayer 92 may be or comprise titanium nitride, titanium oxide, tantalumnitride, tantalum oxide, the like, or a combination thereof, and may bedeposited by ALD, CVD, or another deposition technique. The adhesionlayer 90 and barrier layer 92 may have various thicknesses as describedbelow following further processing.

FIG. 14 illustrates the formation of a BARC 94 in the openings 82, 84,and 86 over the barrier layer 92. The BARC 94 may be, for example, anorganic material or another material deposited by spin-coating oranother deposition technique. The BARC 94 may be initially deposited inthe openings 82, 84, and 86 and to a level above the top surface of theIMD 80 and/or above top surfaces of the barrier layer 92. The BARC 94may subsequently be etched back to have top surfaces below the topsurface of the IMD 80. The BARC 94 may be etched back to a seventhdimension D7 below the top surface of the IMD 80, which seventhdimension D7 can be in a range from about 10 nm to about 20 nm. Further,an eighth dimension D8 is from a bottom surface of the opening 84 (e.g.,a top surface of the conductive feature 72 to which the opening 84 isformed) to the top surface of the BARC 94. A ratio of the eighthdimension D8 to the sixth dimension D6 is less than 1, such as less thatabout 0.5, and more particularly, in a range from about 0.2 to about0.5.

The etch back may be or include a dry (e.g., plasma) etch process. Theplasma etch process may include a RIE, NBE, ICP etch, the like, or acombination thereof. Example etchant gases that can be used for a plasmaetch process include argon (Ar) gas or another etchant gas. The plasmaetch process may be as described above with respect to FIG. 5.

FIG. 15 illustrates the pulling back (e.g., removal by etching) ofportions of the barrier layer 92 and the adhesion layer 90 above the topsurfaces of the BARC 94 and at upper regions of the openings 82, 84, and86. By removing the portions of the barrier layer 92 and the adhesionlayer 90 above the top surfaces of the BARC 94 and at upper regions ofthe openings 82, 84, and 86, first, second, and third conductive featureadhesion layers 90 a, 90 b, and 90 c and first, second, and thirdconductive feature barrier layers 92 a, 92 b, and 92 c are formed in thefirst, second, and third openings 82, 84, and 86, respectively.

The portions of the barrier layer 92 and adhesion layer 90 may beremoved using an etch process. The etch process can include a two-stepwet etch process, such as the pre-treatment and second step etchingdescribed above with respect to FIG. 6. The BARC 94 acts as a maskduring the removal of the portions of the barrier layer 92 and theadhesion layer 90. Hence, top surfaces of, e.g., the second conductivefeature adhesion layer 90 b and second conductive feature barrier layer92 b can be at the seventh dimension D7 from the top surface of the IMD80 and/or at the eighth dimension D8 from the bottom surface of theopening 84. Further, the top surfaces of the second conductive featureadhesion layer 90 b and second conductive feature barrier layer 92 b canbe at a position that has the ratio of the eighth dimension D8 to thesixth dimension D6.

FIG. 16 illustrates the removal of the BARC 94. The BARC 94 may beremoved by an ashing process, such as described above with respect toFIG. 7. After removal of the BARC 94, a residue and/or byproduct may beon upper surfaces of the conductive feature barrier layers 92 a, 92 b,and 92 c interior to the respective openings 82, 84, and 86. The residueand/or byproduct are at profiles 60, an example of which is illustratedand described further with respect to FIG. 20 subsequently. Thebyproduct and/or residue may result from the removing (e.g., etching) ofthe portions of the barrier layer 92 and adhesion layer 90 in FIG. 15and/or from the removing the BARC 94 in FIG. 16. The byproduct and/orresidue can decrease a dimension of and/or constrict the respectiveopenings 82, 84, and 86 at the upper portions of the conductive featurebarrier layers 92 a, 92 b, and 92 c. The first, second, and thirdconductive feature adhesion layers 90 a, 90 b, and 90 c and first,second, and third conductive feature barrier layers 92 a, 92 b, and 92 cmay have various dimensions as described below with respect to FIG. 20.

FIG. 17 illustrates subsequent pulling back (e.g., etching) of theconductive feature barrier layers 92 a, 92 b, and 92 c and conductivefeature adhesion layers 90 a, 90 b, and 90 c to create modifiedconductive feature barrier layers 92 a′, 92 b′, and 92 c′ and modifiedconductive feature adhesion layers 90 a′, 90 b′, and 90 c′,respectively. The etching removes byproduct and/or residue from thesurfaces of the upper portions of the conductive feature barrier layers92 a, 92 b, and 92 c, and can smooth (e.g., by tapering) the upperportions of the conductive feature barrier layers 92 a, 92 b, and 92 cand conductive feature adhesion layers 90 a, 90 b, and 90 c. Thesmoothing of the modified conductive feature barrier layers 92 a′, 92b′, and 92 c′ and modified conductive feature adhesion layers 90 a′, 90b′, and 90 c′ are at profiles 62, an example of which is illustrated anddescribed further with respect to FIG. 21 subsequently. The etching canfurther tune heights of the modified conductive feature barrier layers92 a′, 92 b′, and 92 c′ and modified conductive feature adhesion layers90 a′, 90 b′, and 90 c′ (e.g., reducing the respective heights), such asby increasing a duration of the etching. The first, second, and thirdmodified conductive feature adhesion layers 90 a′, 90 b′, and 90 c′ andfirst, second, and third modified conductive feature barrier layers 92a′, 92 b′, and 92 c′ may have various dimensions as described below withrespect to FIG. 21. The etching may be by a wet etch process, forexample, such as described above with respect to FIG. 8.

FIG. 18 illustrates the formation of conductive material 96 in theopenings 82, 84, and 86 and on the modified conductive feature barrierlayers 92 a′, 92 b′, and 92 c′. The conductive material 96 may be orcomprise a metal, such as tungsten, copper, aluminum, gold, silver,alloys thereof, the like, or a combination thereof, and may be depositedby CVD, ALD, PVD, or another deposition technique. The smoothing toform, e.g., the modified conductive feature barrier layers 92 a′, 92 b′,and 92 c′ can permit larger dimensions at upper portions of the openings82, 84, and 86 compared to when the byproduct and/or residue is present(and, therefore, forming a constriction), and the larger dimensions canpermit the conductive material 96 to better fill the openings 82, 84,and 86 without a void in the conductive material 96 in the openings 82,84, and 86.

FIG. 19 illustrates the removal of excess conductive material 96. Afterthe conductive material 96 is deposited, excess conductive material 96over the top surface of the second ILD 40 may be removed by using aplanarization process, such as a CMP, for example. The planarizationprocess may remove excess conductive material 96 from above the topsurface of the IMD 80. This forms conductive features 100, 102, and 104comprising the conductive material 96 in the openings 82, 84, and 86,respectively. Top surfaces of the conductive features 100, 102, and 104and second ILD 40 may be coplanar. Accordingly, conductive features 100,102, and 104 including the conductive material 96, barrier layers 92 a′,92 b′, and 92 c′, and adhesion layers 90 a′, 90 b′, and 90 c′ may beformed to corresponding conductive features 70, 72, and 74.

As shown by the preceding, aspects of some embodiments can be applied toBack End Of the Line (BEOL) processes. Conductive features 100, 102, and104, including the processes by which the conductive features 100, 102,and 104 were formed, can implement aspects of various embodiments inBEOL processing. Other conductive features formed in BEOL processes maysimilarly incorporate aspects of according to some embodiments.

FIG. 20 illustrates a profile 60 of an adhesion layer 112 and barrierlayer 114 in an opening 118 through a dielectric layer 110 in accordancewith some embodiments. The profile 60 may be formed during processing asshown in FIGS. 7 and 16. Byproduct and/or residue 116 is formed on uppersurfaces of the barrier layer 114 interior to the opening 118. Thisbyproduct and/or residue 116 can form as a result of etching theadhesion layer 112 and barrier layer 114, like in FIGS. 6 and 15, and/oras a result of removing a BARC, like in FIGS. 7 and 16. The byproductand/or residue 116 constricts the opening 118, e.g., the byproductand/or residue 116 decreases a dimension of the opening 118. Forexample, the opening 118 has a constricted width WC at an upper regionof the barrier layer 114 due to the presence of the byproduct and/orresidue 116.

The adhesion layer 112 has a ninth dimension D9 (e.g., a thickness at atop of the adhesion layer 112), which can be in a range from about 0.5nm to about 1 nm, and has a tenth dimension D10 (e.g., a thickness at abottom of the adhesion layer 112), which can be in a range from about 1nm to about 2 nm. The ninth dimension D9 and tenth dimension D10 can bean as-deposited thickness of the adhesion layer 112 at the respectivelocations of the dimensions. A ratio of the tenth dimension D10 to theninth dimension D9 can be in a range from about 1 to about 4. Athickness of the adhesion layer 112 along the sidewall of the opening118 can decrease at a rate of 0.4 nm per 10 nm of depth from thethickness at the top of the adhesion layer 112 (e.g., ninth dimensionD9) to the thickness at the bottom of the adhesion layer 112 (e.g.,tenth dimension D10).

The barrier layer 114 has an eleventh dimension D11 (e.g., a thicknessat a top of the barrier layer 114), which can be in a range from about1.5 nm to about 2.5 nm, and has a twelfth dimension D12 (e.g., athickness at a bottom of the barrier layer 114), which can be in a rangefrom about 1.5 nm to about 2.5 nm. The eleventh dimension D11 andtwelfth dimension D12 can be an as-deposited thickness of the barrierlayer 114 at the respective locations of the dimensions. A ratio of thetwelfth dimension D12 to the eleventh dimension D11 can be in a rangefrom about 1 to about 1.7. A thickness of the barrier layer 114 alongthe vertical portion of the adhesion layer 112 can decrease at a rate of0.2 nm per 10 nm of depth from the thickness at the top of the barrierlayer 114 (e.g., eleventh dimension D11) to the thickness at the bottomof the barrier layer 114 (e.g., twelfth dimension D12).

The adhesion layer 112 and barrier layer 114 have respective topsurfaces at a thirteenth dimension D13 from a top surface of thedielectric layer 110, and at a fourteenth dimension D14 from a bottomsurface of the opening 118. The thirteenth dimension D13 correspondswith the third dimension D3 in FIG. 6 and the seventh dimension D7 inFIG. 14. The fourteenth dimension D14 corresponds with the fourthdimension D4 in FIG. 6 and the eighth dimension D8 in FIG. 14.

FIG. 21 illustrates a profile 62 of a modified adhesion layer 112′ andmodified barrier layer 114′ in the opening 118 through the dielectriclayer 110 in accordance with some embodiments. The profile 62 may beformed during processing as shown in FIGS. 8 and 17. The etchingdescribed with respect to FIGS. 8 and 17 removes the byproduct and/orresidue 116 from the upper surfaces of the barrier layer 114. Further,the etching may etch the barrier layer 114 and adhesion layer 112 tosmooth or taper the barrier layer 114 and adhesion layer 112, which canresult in the modified adhesion layer 112′ and modified barrier layer114′. This etch process can therefore remove the constriction of theopening 118 caused, at least in part, by the byproduct and/or residue116. For example, the opening 118 in FIG. 21 has an upper width WU at anupper region of the modified barrier layer 114′ that is greater than theconstricted width WC in FIG. 20. For example, the upper width WU can bein a range from about 1 nm to about 5 nm greater than the constrictedwidth WC.

The modified barrier layer 114′ has a fifteenth dimension D15 (e.g., athickness at a top of the modified barrier layer 114′), which can be ina range from about 0.2 nm to about 1.2 nm, and has a sixteenth dimensionD16 (e.g., a thickness at a bottom of the modified barrier layer 114′),which can be in a range from about 1.5 nm to about 2.5 nm. A ratio ofsixteenth dimension D16 to the fifteenth dimension D15 can be in a rangefrom about 1 to about 10. A thickness of the modified barrier layer 114′along the vertical portion of the modified adhesion layer 112′ candecrease at a rate of 0.5 nm per 10 nm of depth from the thickness atthe top of the modified barrier layer 114′ (e.g., fifteenth dimensionD15) to the thickness at the bottom of the modified barrier layer 114′(e.g., sixteenth dimension D16).

A ratio of the fifteenth dimension D15 to the eleventh dimension D11(e.g., a ratio of the thicknesses of the barrier layer 114 and 114′ atthe top after and before the etching) can be less than 1, such as in arange from about 0.1 to about 0.8. A ratio of the sixteenth dimensionD16 to the twelfth dimension D12 (e.g., a ratio of the thicknesses ofthe barrier layer 114 and 114′ at the bottom after and before theetching) can be less than 1, such as in a range from about 0.6 to about0.9. In some examples, a rate of the thinning of the barrier layer 114by the etching can be at a rate of about 0.3 nm to about 1.5 nm perminute. A change between the ratio (R_(D12:D11)) of the twelfthdimension D12 to the eleventh dimension D11 to the ratio (R_(D16:D15))of sixteenth dimension D16 to the fifteenth dimension D15 (e.g.,R_(D12:D11) minus R_(D16:D15)) can be in a range from about 0.9 to about1.

The modified adhesion layer 112′ generally is not laterally etchedbecause, in many examples, the modified barrier layer 114′ remains onthe modified adhesion layer 112′. However, in some examples, themodified adhesion layer 112′ may be laterally etched where the modifiedbarrier layer 114′ is removed. In these examples, the modified adhesionlayer 112′ may have thicknesses altered as described above with respectto the modified barrier layer 114′.

The modified barrier layer 114′ has a top surface at a seventeenthdimension D17 from the top surface of the dielectric layer 110, and atan eighteenth dimension D18 from the bottom surface of the opening 118.The modified adhesion layer 112′ has a top surface at a nineteenthdimension D19 from the top surface of the dielectric layer 110, and at atwentieth dimension D20 from the bottom surface of the opening 118. Theetching can cause the heights (e.g., the fourteenth dimension D14) ofthe barrier layer 114 and the adhesion layer 112 to be reduced, e.g., tothe eighteenth dimension D18 and twentieth dimension D20, respectively.In some examples, the height of the barrier layer 114 is reduced morethan the height of the adhesion layer 112 due to the barrier layer 114being subjected to vertical and lateral etching at the top surface ofthe barrier layer 114, whereas the adhesion layer 112 is generallysubjected to only vertical etching until the barrier layer 114 islaterally removed from the adhesion layer 112, which can then cause theadhesion layer to be subjected to lateral etching.

A difference between the fourteenth dimension D14 and the eighteenthdimension D18 (e.g., fourteenth dimension D14 minus eighteenth dimensionD18), and conversely, a difference between the seventeenth dimension D17and the thirteenth dimension D13 (e.g., seventeenth dimension D17 minusthirteenth dimension D13), can be in a range from about 1 nm to about 5nm. Similarly, a difference between the fourteenth dimension D14 and thetwentieth dimension D20 (e.g., fourteenth dimension D14 minus twentiethdimension D20), and conversely, a difference between the nineteenthdimension D19 and the thirteenth dimension D13 (e.g., nineteenthdimension D19 minus thirteenth dimension D13), can be in a range fromabout 1 nm to about 5 nm. A difference between the twentieth dimensionD20 and the eighteenth dimension D18 (e.g., twentieth dimension D20minus eighteenth dimension D18), and conversely, a difference betweenthe seventeenth dimension D17 and the nineteenth dimension D19 (e.g.,seventeenth dimension D17 minus nineteenth dimension D19), can be in arange from about 1 nm to about 5 nm.

Some embodiments can achieve advantages. By removing a constriction atan upper portion of an opening or recess (e.g., caused, at least inpart, by a byproduct and/or residue), conductive material that will forma conductive feature can be more easily deposited in the opening orrecess without a void being formed in the opening or recess.Particularly when dimensions of conductive features are small, voids inconductive features can cause higher resistance of the conductivefeatures or complete failure of the conductive feature, such as byfailing to establish electrical contact. Hence, mitigating voidformation may be advantageous, particularly in small technology nodes,such as 7 nm and smaller. Further, heights of adhesion layers andbarrier layers in conductive features can be better tuned in someembodiments by a second pull back.

An embodiment is a method. A barrier layer is formed along a sidewall. Aportion of the barrier layer along the sidewall is etched back. Afteretching back the portion of the barrier layer, an upper portion of thebarrier layer along the sidewall is smoothed. A conductive material isformed along the barrier layer and over the smoothed upper portion ofthe barrier layer.

Another embodiment is a structure. The structure includes a dielectriclayer, a barrier layer, and a conductive material. The dielectric layerhas a sidewall. The barrier layer is along the sidewall, and an uppersurface of the barrier layer is below a top surface of the dielectriclayer. A thickness of an upper portion of the barrier layer is less thana thickness of a lower portion of the barrier layer. The conductivematerial is along the barrier layer and over the upper surface of thebarrier layer. The conductive material has a top surface that iscoplanar with the top surface of the dielectric layer.

A further embodiment is a method. A dielectric layer is formed over asemiconductor substrate, and an opening is formed through the dielectriclayer. A barrier layer is conformally formed in the opening. A firstupper portion of the barrier layer is removed from the opening. Aremaining upper portion of the barrier layer is in the opening afterremoving the first upper portion of the barrier layer. After removingthe first upper portion of the barrier layer, the barrier layer isetched. A conductive material is formed on the barrier layer in theopening. A top surface of the conductive material is coplanar with a topsurface of the dielectric layer, and the conductive material has aportion above the remaining upper portion of the barrier layer.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A structure comprising: a dielectric layer havinga sidewall; a barrier layer along the sidewall, an upper surface of thebarrier layer being below a top surface of the dielectric layer, athickness of an upper portion of the barrier layer being less than athickness of a lower portion of the barrier layer; and a conductivematerial along the barrier layer and over the upper surface of thebarrier layer, the conductive material having a top surface that iscoplanar with the top surface of the dielectric layer.
 2. The structureof claim 1, wherein no residue and no byproduct is between theconductive material and the upper portion of the barrier layer.
 3. Thestructure of claim 1, wherein no void is in the conductive material. 4.The structure of claim 1, wherein the conductive material abuts thesidewall of the dielectric layer above the upper surface of the barrierlayer.
 5. The structure of claim 1 further comprising an adhesion layeralong the sidewall, the adhesion layer being disposed between thesidewall of the dielectric layer and the barrier layer.
 6. The structureof claim 1, wherein the dielectric layer is an interlayer dielectric(ILD), and the conductive material and the barrier layer are at least aportion of a conductive feature to a source/drain region on asemiconductor substrate, the ILD being disposed over the semiconductorsubstrate.
 7. The structure of claim 1, wherein the dielectric layer isan intermetallization dielectric (IMD), and the conductive material andthe barrier layer are at least a portion of a conductive feature in theIMD.
 8. A structure comprising: a dielectric layer having a sidewall; anadhesion layer along the sidewall of the dielectric layer, an uppersurface of the adhesion layer being lower than a top surface of thedielectric layer; a barrier layer along a sidewall of the adhesionlayer, the adhesion layer being interposed between the barrier layer andthe dielectric layer, an upper surface of the barrier layer being lowerthan the upper surface of the adhesion layer; and a conductive materialon the barrier layer and over the upper surface of the barrier layer,the conductive material having a top surface that is coplanar with thetop surface of the dielectric layer.
 9. The structure of claim 8,further comprising a gate structure and a spacer adjacent the gatestructure, wherein the adhesion layer contacts the spacer.
 10. Thestructure of claim 8, wherein an upper thickness of the adhesion layeris in a range from about 0.5 nm to about 1 nm.
 11. The structure ofclaim 10, wherein a lower thickness of the adhesion layer is in a rangefrom about 1 nm to about 2 nm.
 12. The structure of claim 11, wherein aratio of the lower thickness to the upper thickness is in a range fromabout 1 to about
 4. 13. The structure of claim 8, wherein an upperthickness of the barrier layer is in a range from about 0.2 nm to about1.2 nm.
 14. The structure of claim 13, wherein a lower thickness of thebarrier layer is in a range from about 1.5 nm to about 2.5 nm.
 15. Thestructure of claim 14, wherein a ratio of the lower thickness to theupper thickness is in a range from about 1 to about
 10. 16. A structurecomprising: a first conductive feature; a dielectric layer over thefirst conductive feature; and a second conductive feature in thedielectric layer, the second conductive feature comprising: an adhesionlayer on the first conductive feature; a barrier layer on the adhesionlayer, the adhesion layer being interposed between the barrier layer andthe first conductive feature, an upper surface of the barrier layerbeing lower than an upper surface of the adhesion layer; and aconductive material on the barrier layer, the conductive materialextending over the upper surface of the adhesion layer and the uppersurface of the barrier layer, a top surface of the conductive materialbeing level with a top surface of the dielectric layer.
 17. Thestructure of claim 16, wherein a difference between a first height and asecond height is in a range from about 1 nm to about 5 nm, wherein thefirst height is measured from a bottom of the adhesion layer to anuppermost surface of the adhesion layer, wherein the second height ismeasured from the bottom of the adhesion layer to an uppermost surfaceof the barrier layer.
 18. The structure of claim 16, wherein adifference between a first height and a second height is in a range fromabout 1 nm to about 5 nm, wherein the first height is measured from atop of the dielectric layer to an uppermost surface of the barrierlayer, wherein the second height is measured from the top of thedielectric layer to an uppermost surface of the adhesion layer.
 19. Thestructure of claim 16, wherein the conductive material directly contactsthe dielectric layer.
 20. The structure of claim 16, wherein a width ofthe conductive material is constant or widens as the conductive materialextends away from the first conductive feature.